The present disclosure provides a microfluidic device, a driving method thereof and a microfluidic system. The microfluidic device includes a first substrate and a second substrate disposed opposite to each other, and a microcavity provided between the first and second substrates for accommodating droplets. The microfluidic device further includes at least one ultrasonic layer provided between the first and second substrates. The at least one ultrasonic layer includes a plurality of ultrasonic sensors configured to perform at least one of detection operation and driving operation to the droplets accommodated in the microcavity.