Invention Grant
- Patent Title: Polymer and composition for forming an anti-reflective film and method of manufacturing an integrated circuit device using the anti-reflective film
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Application No.: US16695569Application Date: 2019-11-26
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Publication No.: US11650502B2Publication Date: 2023-05-16
- Inventor: Miyeong Kang , Sukkoo Hong , Hyereun Kim , Jihyun Kim , Hyunjin Kim , Hyojung Roh , Jongkyoung Park , Jungyoul Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD. , Dongjin Semichem Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.,DONGJIN SEMICHEM CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.,DONGJIN SEMICHEM CO., LTD.
- Current Assignee Address: KR Suwon-si; KR Hwaseong-si
- Agency: F. Chau & Associates, LLC
- Priority: KR 20190036211 2019.03.28
- Main IPC: G03F7/09
- IPC: G03F7/09 ; C08G18/79 ; C08G18/38 ; C09D175/04 ; G03F7/039 ; G03F7/038

Abstract:
A polymer having a repeating unit represented by Formula 1:
wherein each of R1, R2, and R3 is independently selected from a substituted or unsubstituted C1-C6 chain-like saturated or unsaturated hydrocarbon group having 0 to 2 first heteroatoms or a substituted or unsubstituted C3-C6 cyclic saturated or unsaturated hydrocarbon group having 0 to 2 first heteroatoms, wherein at least one of R1, R2, and R3 is a hydrocarbon group substituted with a fluorine atom. R4 is a C1-C10 chain-like saturated or unsaturated hydrocarbon group having 0 to 2 second heteroatoms or a C3-C10 cyclic saturated or unsaturated hydrocarbon group having 0 to 2 second heteroatoms. R5 is a C1-C10 chain-like saturated or unsaturated hydrocarbon group having 1 to 6 third heteroatoms or a C3-C10 cyclic saturated or unsaturated hydrocarbon group having 1 to 6 third heteroatoms.
wherein each of R1, R2, and R3 is independently selected from a substituted or unsubstituted C1-C6 chain-like saturated or unsaturated hydrocarbon group having 0 to 2 first heteroatoms or a substituted or unsubstituted C3-C6 cyclic saturated or unsaturated hydrocarbon group having 0 to 2 first heteroatoms, wherein at least one of R1, R2, and R3 is a hydrocarbon group substituted with a fluorine atom. R4 is a C1-C10 chain-like saturated or unsaturated hydrocarbon group having 0 to 2 second heteroatoms or a C3-C10 cyclic saturated or unsaturated hydrocarbon group having 0 to 2 second heteroatoms. R5 is a C1-C10 chain-like saturated or unsaturated hydrocarbon group having 1 to 6 third heteroatoms or a C3-C10 cyclic saturated or unsaturated hydrocarbon group having 1 to 6 third heteroatoms.
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