- 专利标题: Optical deflector parameter measurement device, method, and program
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申请号: US17293706申请日: 2019-12-02
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公开(公告)号: US11656073B2公开(公告)日: 2023-05-23
- 发明人: Masahiro Ueno , Soichi Oka
- 申请人: NIPPON TELEGRAPH AND TELEPHONE CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: Nippon Telegraph and Telephone Corporation
- 当前专利权人: Nippon Telegraph and Telephone Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Slater Matsil, LLP
- 优先权: JP 2018235207 2018.12.17
- 国际申请: PCT/JP2019/046962 2019.12.02
- 国际公布: WO2020/129584A 2020.06.25
- 进入国家日期: 2021-05-13
- 主分类号: G01B11/26
- IPC分类号: G01B11/26 ; G01J9/02 ; G01M11/02 ; G01B9/02004
摘要:
A parameter measurement device of a light deflector includes a photodetector that receives output light from the light deflector, a biaxial translation automatic stage that moves the photodetector to a plurality of positions, and a signal processing device that calculates the wavelength of the output light of a wavelength sweeping light source for each time, calculates the wavelength of the light received from the light deflector by the photodetector based on the output signal of the photodetector and a previously-calculated wavelength, and calculates the incident angle of the output light beam of the wavelength sweeping light source onto the diffraction grating and an angle formed by an L-axis and a line perpendicular to the surface of the diffraction grating by performing fitting so that the coordinates of the photodetector that are obtained for each position of the photodetector and the wavelength of the light conform to a prescribed relational expression.
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