Invention Grant
- Patent Title: Inspection and metrology using broadband infrared radiation
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Application No.: US15794887Application Date: 2017-10-26
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Publication No.: US11662646B2Publication Date: 2023-05-30
- Inventor: Yung-Ho Alex Chuang , Vahid Esfandyarpour , John Fielden , Baigang Zhang , Yinying Xiao Li
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01N21/3563
- IPC: G01N21/3563 ; G02F1/39 ; G01N21/88 ; G01N21/956 ; G01N21/359 ; G01N21/95 ; G02F1/355 ; H01L21/67 ; G01N21/21

Abstract:
Systems and methods for measuring or inspecting semiconductor structures using broadband infrared radiation are disclosed. The system may include an illumination source comprising a pump source configured to generate pump light and a nonlinear optical (NLO) assembly configured to generate broadband IR radiation in response to the pump light. The system may also include a detector assembly and a set of optics configured to direct the IR radiation onto a sample and direct a portion of the IR radiation reflected and/or scattered from the sample to the detector assembly.
Public/Granted literature
- US20180224711A1 Inspection and Metrology Using Broadband Infrared Radiation Public/Granted day:2018-08-09
Information query
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