公开(公告)号：US20180224711A1

公开(公告)日：2018-08-09

申请号：US15794887

申请日：2017-10-26

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Alex Chuang ,  Vahid Esfandyarpour ,  John Fielden ,  Baigang Zhang ,  Yinying Xiao Li

IPC: G02F1/39 ,  G02F1/355 ,  H01L21/67 ,  G01N21/359 ,  G01N21/95

Abstract: Systems and methods for measuring or inspecting semiconductor structures using broadband infrared radiation are disclosed. The system may include an illumination source comprising a pump source configured to generate pump light and a nonlinear optical (NLO) assembly configured to generate broadband IR radiation in response to the pump light. The system may also include a detector assembly and a set of optics configured to direct the IR radiation onto a sample and direct a portion of the IR radiation reflected and/or scattered from the sample to the detector assembly.

公开(公告)号：US11662646B2

公开(公告)日：2023-05-30

申请号：US15794887

申请日：2017-10-26

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Alex Chuang ,  Vahid Esfandyarpour ,  John Fielden ,  Baigang Zhang ,  Yinying Xiao Li

IPC: G01N21/3563 ,  G02F1/39 ,  G01N21/88 ,  G01N21/956 ,  G01N21/359 ,  G01N21/95 ,  G02F1/355 ,  H01L21/67 ,  G01N21/21

CPC classification number: G02F1/39 ,  G01N21/359 ,  G01N21/3563 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G02F1/3551 ,  G02F1/3556 ,  G02F1/3558 ,  H01L21/67253 ,  G01N2021/213 ,  G01N2021/3568 ,  G01N2021/8848

Abstract: Systems and methods for measuring or inspecting semiconductor structures using broadband infrared radiation are disclosed. The system may include an illumination source comprising a pump source configured to generate pump light and a nonlinear optical (NLO) assembly configured to generate broadband IR radiation in response to the pump light. The system may also include a detector assembly and a set of optics configured to direct the IR radiation onto a sample and direct a portion of the IR radiation reflected and/or scattered from the sample to the detector assembly.