Invention Grant
- Patent Title: Degassing apparatus and substrate treating apparatus
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Application No.: US17468800Application Date: 2021-09-08
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Publication No.: US11673075B2Publication Date: 2023-06-13
- Inventor: Dae Sung Kim
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Li & Cai Intellectual Property (USA) Office
- Priority: KR 20200116370 2020.09.10
- Main IPC: B01D19/00
- IPC: B01D19/00 ; G03F7/00

Abstract:
Disclosed is a degassing apparatus. The degassing apparatus includes a dissolved gas extracting nozzle that extracts dissolved gases in a form of bubbles from a treatment solution including the dissolved gases, a first tank that separates the bubbles extracted while passing through the dissolved gas extracting nozzle from the treatment solution, and a second tank having a stabilization space, in which the treatment solution, from which the bubbles have been separated, is stored from the first tank and is stabilized. The dissolved gas extracting nozzle is configured such that a diameter of an outlet is smaller than a diameter of an intermediate passage such that the dissolved gases in the treatment solution are extracted in the form of the bubbles through a cavitation phenomenon.
Public/Granted literature
- US20220072452A1 DEGASSING APPARATUS AND SUBSTRATE TREATING APPARATUS Public/Granted day:2022-03-10
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