Invention Grant
- Patent Title: Reactor for coating particles in stationary chamber with rotating paddles and gas injection
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Application No.: US16855871Application Date: 2020-04-22
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Publication No.: US11674223B2Publication Date: 2023-06-13
- Inventor: Jonathan Frankel , Colin C. Neikirk , Pravin K. Narwankar , Quoc Truong , Govindraj Desai , Sekar Krishnasamy , Shrikant Swaminathan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/455 ; B01J19/00 ; B01J19/18 ; B01F27/051 ; B01F27/70 ; B01F27/07 ; B01F27/112 ; B01F27/072

Abstract:
A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a curved inner surface of the half-cylinder.
Public/Granted literature
- US20200338521A1 REACTOR FOR COATING PARTICLES IN STATIONARY CHAMBER WITH ROTATING PADDLES AND GAS INJECTION Public/Granted day:2020-10-29
Information query
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