Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US17198043Application Date: 2021-03-10
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Publication No.: US11676799B2Publication Date: 2023-06-13
- Inventor: Koji Yamagishi , Hiroshi Ikeda , Hiroyuki Kondo
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Weihrouch IP
- Priority: JP 2020043798 2020.03.13
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing apparatus includes a chamber; a first electrode facing an inside of the chamber; a radio-frequency power supply configured to supply a radio-frequency power to the first electrode; a feeding rod configured to feed the radio-frequency power to a center of a surface of the first electrode opposite to a surface facing the inside of the chamber; a conductive plate provided in parallel to the surface of the first electrode opposite to the surface facing the inside of the chamber, the plate being grounded; and a dielectric plate connecting the first electrode and the conductive plate, and having a shape that is rotationally symmetric with respect to a center of the first electrode.
Public/Granted literature
- US20210287879A1 PLASMA PROCESSING APPARATUS Public/Granted day:2021-09-16
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