公开(公告)号：US11676799B2

公开(公告)日：2023-06-13

申请号：US17198043

申请日：2021-03-10

Applicant: Tokyo Electron Limited

Inventor： Koji Yamagishi ,  Hiroshi Ikeda ,  Hiroyuki Kondo

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J37/32449 ,  H01J37/32541 ,  H01J37/32577 ,  H01J2237/3344

Abstract: A plasma processing apparatus includes a chamber; a first electrode facing an inside of the chamber; a radio-frequency power supply configured to supply a radio-frequency power to the first electrode; a feeding rod configured to feed the radio-frequency power to a center of a surface of the first electrode opposite to a surface facing the inside of the chamber; a conductive plate provided in parallel to the surface of the first electrode opposite to the surface facing the inside of the chamber, the plate being grounded; and a dielectric plate connecting the first electrode and the conductive plate, and having a shape that is rotationally symmetric with respect to a center of the first electrode.

公开(公告)号：US20210005477A1

公开(公告)日：2021-01-07

申请号：US16910575

申请日：2020-06-24

Applicant: Tokyo Electron Limited

Inventor： Ryou Son ,  Sinya Sasaki ,  Hiroyuki Kondo ,  Syuntaro Tamaraya ,  Takaaki Kikuchi

IPC: H01L21/67 ,  C23C16/48 ,  C23C16/44 ,  C23C16/458

Abstract: A substrate processing apparatus includes an inner wall formed of a heat conductive material, a quartz liner that covers the inner wall, and a cooling unit that cools the inner wall. A gap is formed between the inner wall and the quartz liner, and a sealing member is provided in the gap to seal the gap. The gap is filled with a heat conductive medium.

公开(公告)号：US10832892B2

公开(公告)日：2020-11-10

申请号：US16478770

申请日：2018-01-04

Applicant: Tokyo Electron Limited

Inventor： Kazuki Takahashi ,  Yuki Kawada ,  Naoki Matsumoto ,  Takahiro Senda ,  Koji Koyama ,  Shohei Fukano ,  Jun Yoshikawa ,  Hiroyuki Kondo ,  Takashi Minakawa

IPC: H01J37/32 ,  H05H1/46

Abstract: An antenna according to an aspect includes: a dielectric window having a first surface and a second surface, the second surface having an annular recessed surface and a flat surface surrounded by the recessed surface; a slot plate; a dielectric plate; a heat transfer member made of metal and having an upper surface and a lower surface opposing each other; a cooling jacket; and a heater, in which the upper surface includes a plurality of first regions and a second region, the cooling jacket is mounted on the plurality of first regions, the second region is recessed further toward the lower surface side than the plurality of first regions, the heater is mounted on the second region, and each of the plurality of first regions is provided at a position at least partially overlapping with the flat surface when viewed in a direction parallel to a central axis.