Invention Grant
- Patent Title: Semiconductor memory device with a phase change layer and particular heater material
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Application No.: US17400912Application Date: 2021-08-12
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Publication No.: US11678593B2Publication Date: 2023-06-13
- Inventor: Katsuyoshi Komatsu , Takeshi Iwasaki , Tadaomi Daibou , Hiroki Kawai
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP 2021008890 2021.01.22
- Main IPC: G11C13/00
- IPC: G11C13/00 ; H01L45/00

Abstract:
A semiconductor memory device includes a first electrode and a second electrode, a phase change layer disposed between the first electrode and the second electrode, and a first layer disposed between the first electrode and the phase change layer. The phase change layer contains at least one of germanium (Ge), antimony (Sb), and tellurium (Te). The first layer contains aluminum (Al) and antimony (Sb), or tellurium (Te) and at least one of zinc (Zn), lanthanum (La), cerium (Ce), praseodymium (Pr), neodymium (Nd), samarium (Sm), europium (Eu), gadolinium (Gd), terbium (Tb), dysprosium (Dy), holmium (Ho), erbium (Er), thulium (Tm), ytterbium (Yb), and lutetium (Lu).
Public/Granted literature
- US20220238801A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-07-28
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