Invention Grant
- Patent Title: Memory device including vertical stack structure and method of manufacturing the same
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Application No.: US17459527Application Date: 2021-08-27
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Publication No.: US11682717B2Publication Date: 2023-06-20
- Inventor: Yumin Kim , Doyoon Kim , Seyun Kim , Jinhong Kim , Soichiro Mizusaki , Youngjin Cho
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20210037442 2021.03.23
- Main IPC: H01L29/68
- IPC: H01L29/68 ; H01L27/115

Abstract:
Disclosed are a memory device including a vertical stack structure and a method of manufacturing the memory device. The memory device includes an insulating structure having a shape including a first surface and a protrusion portion protruding in a first direction from the first surface, a recording material layer covering the protrusion portion along a protruding shape of the protrusion portion and extending to the first surface on the insulating structure a channel layer on the recording material layer along a surface of the recording material layer, a gate insulating layer on the channel layer, and a gate electrode formed at a location on the gate insulating layer to face a second surface which is a protruding upper surface of the protrusion portion, wherein a void exists between the gate electrode and the insulating structure, defined by the insulating structure and the recording material layer.
Public/Granted literature
- US20220310827A1 MEMORY DEVICE INCLUDING VERTICAL STACK STRUCTURE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2022-09-29
Information query
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