- 专利标题: Photoacoustic sensors and associated production methods
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申请号: US17407803申请日: 2021-08-20
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公开(公告)号: US11686667B2公开(公告)日: 2023-06-27
- 发明人: Horst Theuss , Rainer Markus Schaller
- 申请人: Infineon Technologies AG
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 代理机构: Slater Matsil, LLP
- 优先权: DE 2020122812.0 2020.09.01
- 主分类号: G01N21/17
- IPC分类号: G01N21/17 ; G01N29/24 ; B81B7/02
摘要:
A photoacoustic sensor includes a first layer with an optical MEMS emitter; a second layer stacked over the first layer with a MEMS pressure pick-up and an optically transparent window, wherein the MEMS pressure pick-up and the optically transparent window are offset laterally with respect to one another; and a third layer stacked over the second layer with a cavity for a reference gas. The optical MEMS emitter transmits optical radiation along an optical path, wherein the optical path runs through the optically transparent window and the cavity for the reference gas, and wherein the MEMS pressure pick-up is outside the course of the optical path.
公开/授权文献
- US20220065773A1 Photoacoustic Sensors and Associated Production Methods 公开/授权日:2022-03-03
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