Invention Grant
- Patent Title: Method and system for audio recognition of arcing during semiconductor process
-
Application No.: US16721684Application Date: 2019-12-19
-
Publication No.: US11688413B2Publication Date: 2023-06-27
- Inventor: Chih-Yu Wang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Seed IP Law Group
- Main IPC: G10L25/51
- IPC: G10L25/51 ; G06N20/00 ; H01L21/67 ; H01L21/66 ; H04R1/40 ; H04R3/00 ; H04R3/04

Abstract:
An arcing detection system detects arcing within a semiconductor processing cleanroom environment. The arcing detection system includes an array of microphones positioned within the cleanroom environment. The microphones receive soundwaves within the cleanroom environment and generate audio signals based on the sound waves. The arcing system includes a control system that receives the audio signals from the microphones. The control system analyzes the audio signals and detects arcing within the cleanroom environment based on the audio signals. The control system can adjust a semiconductor process in real time responsive to detecting arcing.
Public/Granted literature
- US20210193166A1 METHOD AND SYSTEM FOR AUDIO RECOGNITION OF ARCING DURING SEMICONDUCTOR PROCESS Public/Granted day:2021-06-24
Information query