- 专利标题: Thermal management solutions for stacked integrated circuit devices
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申请号: US16007269申请日: 2018-06-13
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公开(公告)号: US11688665B2公开(公告)日: 2023-06-27
- 发明人: Feras Eid , Adel Elsherbini , Johanna Swan
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Essential Patents Group, LLP
- 主分类号: H01L23/31
- IPC分类号: H01L23/31 ; H01L23/367 ; H01L23/488 ; H01L23/46 ; H01L23/473 ; H01L25/065 ; H01L23/498 ; H01L23/467 ; H01L23/538
摘要:
An integrated circuit assembly may be formed having a substrate, a first integrated circuit device electrically attached to the substrate, a second integrated circuit device electrically attached to the first integrated circuit device, and a heat dissipation device defining a fluid chamber, wherein at least a portion of the first integrated circuit device and at least a portion of the second integrated circuit device are exposed to the fluid chamber. In further embodiments, at least one channel may be formed in an underfill material between the first integrated circuit device and the second integrated circuit device, between the first integrated circuit device and the substrate, and/or between the second integrated circuit device and the substrate, wherein the at least one channel is open to the fluid chamber.
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