- Patent Title: Thermal management solutions for stacked integrated circuit devices
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Application No.: US16007269Application Date: 2018-06-13
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Publication No.: US11688665B2Publication Date: 2023-06-27
- Inventor: Feras Eid , Adel Elsherbini , Johanna Swan
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- Main IPC: H01L23/31
- IPC: H01L23/31 ; H01L23/367 ; H01L23/488 ; H01L23/46 ; H01L23/473 ; H01L25/065 ; H01L23/498 ; H01L23/467 ; H01L23/538

Abstract:
An integrated circuit assembly may be formed having a substrate, a first integrated circuit device electrically attached to the substrate, a second integrated circuit device electrically attached to the first integrated circuit device, and a heat dissipation device defining a fluid chamber, wherein at least a portion of the first integrated circuit device and at least a portion of the second integrated circuit device are exposed to the fluid chamber. In further embodiments, at least one channel may be formed in an underfill material between the first integrated circuit device and the second integrated circuit device, between the first integrated circuit device and the substrate, and/or between the second integrated circuit device and the substrate, wherein the at least one channel is open to the fluid chamber.
Public/Granted literature
- US20190385933A1 THERMAL MANAGEMENT SOLUTIONS FOR STACKED INTEGRATED CIRCUIT DEVICES Public/Granted day:2019-12-19
Information query
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