Invention Grant
- Patent Title: 3D memory device and manufacturing method thereof
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Application No.: US17160066Application Date: 2021-01-27
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Publication No.: US11690223B2Publication Date: 2023-06-27
- Inventor: Chung Yi Lin , Chih-Hsiung Lee
- Applicant: MACRONIX International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H10B43/27 ; H10B43/10 ; H10B43/30

Abstract:
Provided are a three-dimensional (3D) memory device and a manufacturing method thereof. The 3D memory device includes a gate stacked structure, a channel layer, a charge storage structure, an electrode layer and a capacitor dielectric layer. The gate stacked structure is disposed on a substrate and includes a plurality of gate layers electrically insulated from each other. The gate stacked structure has at least one channel hole and at least one capacitor trench. The channel layer is disposed on the sidewall of the at least one channel hole. The charge storage structure is disposed between the channel layer and the sidewall of the at least one channel hole. The electrode layer is disposed on the sidewall of the at least one capacitor trench. The capacitor dielectric layer is disposed between the electrode layer and the sidewall of the at least one capacitor trench.
Public/Granted literature
- US20220238549A1 3D MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2022-07-28
Information query
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