Invention Grant
- Patent Title: Phase change memory cell with an airgap to allow for the expansion and restriction of the PCM material
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Application No.: US17303836Application Date: 2021-06-09
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Publication No.: US11690305B2Publication Date: 2023-06-27
- Inventor: Kangguo Cheng , Ruilong Xie , Carl Radens , Juntao Li
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Samuel A. Waldbaum
- Main IPC: H10N70/00
- IPC: H10N70/00 ; G11C13/00

Abstract:
A phase change memory (PCM) cell comprising a substrate a first electrode located on the substrate. A phase change material layer located adjacent to the first electrode, wherein a first side of the phase change material layer is in direct contact with the first electrode. A second electrode located adjacent to phase change material layer, wherein the second electrode is in direct contact with a second side of the phase change material layer, wherein the first side and the second side are different sides of the phase change material layer. An airgap is located directly above the phase change material layer, wherein the airgap provides space for the phase change material to expand or restrict.
Public/Granted literature
- US20220399493A1 PHASE CHANGE MEMORY CELL WITH AN AIRGAP TO ALLOW FOR THE EXPANSION AND RESTRICTION OF THE PCM MATERIAL Public/Granted day:2022-12-15
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