Invention Grant
- Patent Title: Polishing composition
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Application No.: US16797177Application Date: 2020-02-21
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Publication No.: US11702570B2Publication Date: 2023-07-18
- Inventor: Ryota Mae , Tsutomu Yoshino , Shogo Onishi , Hirofumi Ikawa , Yasuto Ishida
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu
- Agency: Foley & Lardner LLP
- Priority: JP 19061627 2019.03.27 JP 19178322 2019.09.30
- Main IPC: C09G1/02
- IPC: C09G1/02

Abstract:
An object of the present invention is to provide a new polishing composition that contributes to improving the quality of a device.
There is provided a polishing composition containing: an abrasive grain having an organic acid immobilized on a surface thereof; a first water-soluble polymer having a sulfonic acid group or a group having a salt thereof, or a carboxyl group or a group having a salt thereof; a second water-soluble polymer different from the first water-soluble polymer; a nonionic surfactant; and an aqueous carrier, wherein the polishing composition is used for polishing an object to be polished.
There is provided a polishing composition containing: an abrasive grain having an organic acid immobilized on a surface thereof; a first water-soluble polymer having a sulfonic acid group or a group having a salt thereof, or a carboxyl group or a group having a salt thereof; a second water-soluble polymer different from the first water-soluble polymer; a nonionic surfactant; and an aqueous carrier, wherein the polishing composition is used for polishing an object to be polished.
Public/Granted literature
- US20200308449A1 POLISHING COMPOSITION Public/Granted day:2020-10-01
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