Invention Grant
- Patent Title: High efficiency and high sensitivity particle capture type terahertz sensing system
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Application No.: US17138919Application Date: 2020-12-31
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Publication No.: US11703442B2Publication Date: 2023-07-18
- Inventor: Minah Seo , Yong-Sang Ryu , Eui-Sang Yu , Taikjin Lee , Hyun Seok Song
- Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR Seoul
- Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Seoul
- Agency: Cantor Colburn LLP
- Priority: KR 20200071241 2020.06.12
- Main IPC: G01N21/3581
- IPC: G01N21/3581 ; G01N15/14

Abstract:
Provided is a high efficiency and high sensitivity particle capture type terahertz sensing system. The particle capture type terahertz sensing system includes a sensing substrate to capture particles, and a terahertz sensor to emit terahertz electromagnetic waves to the sensing substrate to sense the particles, wherein the sensing substrate includes a base substrate and a particle capture structure layer formed on the base substrate, the particle capture structure layer includes a plurality of slits for focusing the terahertz electromagnetic waves, the particle capture structure layer captures the particles in the plurality of slits using dielectrophoresis, and an area in which the terahertz electromagnetic waves converge to the plurality of slits matches an area in which the particles are captured in the plurality of slits through the dielectrophoresis.
Public/Granted literature
- US20210389228A1 HIGH EFFICIENCY AND HIGH SENSITIVITY PARTICLE CAPTURE TYPE TERAHERTZ SENSING SYSTEM Public/Granted day:2021-12-16
Information query
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