High efficiency and high sensitivity particle capture type terahertz sensing system

    公开(公告)号:US11703442B2

    公开(公告)日:2023-07-18

    申请号:US17138919

    申请日:2020-12-31

    CPC classification number: G01N15/1434 G01N15/1404 G01N2015/1415

    Abstract: Provided is a high efficiency and high sensitivity particle capture type terahertz sensing system. The particle capture type terahertz sensing system includes a sensing substrate to capture particles, and a terahertz sensor to emit terahertz electromagnetic waves to the sensing substrate to sense the particles, wherein the sensing substrate includes a base substrate and a particle capture structure layer formed on the base substrate, the particle capture structure layer includes a plurality of slits for focusing the terahertz electromagnetic waves, the particle capture structure layer captures the particles in the plurality of slits using dielectrophoresis, and an area in which the terahertz electromagnetic waves converge to the plurality of slits matches an area in which the particles are captured in the plurality of slits through the dielectrophoresis.

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