发明授权
- 专利标题: Optical device
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申请号: US16625695申请日: 2018-07-06
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公开(公告)号: US11703679B2公开(公告)日: 2023-07-18
- 发明人: Tatsuya Sugimoto , Tomofumi Suzuki , Kyosuke Kotani
- 申请人: HAMAMATSU PHOTONICS K.K.
- 申请人地址: JP Hamamatsu
- 专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人: HAMAMATSU PHOTONICS K.K.
- 当前专利权人地址: JP Hamamatsu
- 代理机构: Faegre Drinker Biddle & Reath LLP
- 优先权: JP 17133093 2017.07.06 JP 17235025 2017.12.07
- 国际申请: PCT/JP2018/025637 2018.07.06
- 国际公布: WO2019/009395A 2019.01.10
- 进入国家日期: 2019-12-21
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; B81B3/00
摘要:
An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.
公开/授权文献
- US11733509B2 Optical device 公开/授权日:2023-08-22
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