Invention Grant
- Patent Title: Optical device
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Application No.: US16625695Application Date: 2018-07-06
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Publication No.: US11733509B2Publication Date: 2023-08-22
- Inventor: Tatsuya Sugimoto , Tomofumi Suzuki , Kyosuke Kotani
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JP 17133093 2017.07.06 JP 17235025 2017.12.07
- International Application: PCT/JP2018/025637 2018.07.06
- International Announcement: WO2019/009395A 2019.01.10
- Date entered country: 2019-12-21
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00

Abstract:
An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.
Public/Granted literature
- US11703679B2 Optical device Public/Granted day:2023-07-18
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