Invention Grant
- Patent Title: Structures including multiple carbon layers and methods of forming and using same
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Application No.: US17323321Application Date: 2021-05-18
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Publication No.: US11705333B2Publication Date: 2023-07-18
- Inventor: Yoshio Susa , Ryo Miyama , Yoshiyuki Kikuchi
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/033
- IPC: H01L21/033 ; H01J37/32 ; C23C16/56 ; C23C16/26 ; H01L21/311 ; H01L21/3105
Abstract:
Methods and systems for forming a structure including multiple carbon layers and structures formed using the method or system are disclosed. Exemplary methods include forming a first carbon layer and a second carbon layer, wherein a density and/or other property of the first carbon layer differs from the corresponding property of the second carbon layer.
Public/Granted literature
- US20210366712A1 STRUCTURES INCLUDING MULTIPLE CARBON LAYERS AND METHODS OF FORMING AND USING SAME Public/Granted day:2021-11-25
Information query
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