• Patent Title: Bonding apparatus and bonding method
  • Application No.: US17397854
    Application Date: 2021-08-09
  • Publication No.: US11705426B2
    Publication Date: 2023-07-18
  • Inventor: Gil Yong Moon
  • Applicant: SEMES CO., LTD.
  • Applicant Address: KR Cheonan-si
  • Assignee: SEMES CO., LTD.
  • Current Assignee: SEMES CO., LTD.
  • Current Assignee Address: KR Cheonan-si
  • Priority: KR 20200099712 2020.08.10
  • Main IPC: H01L23/00
  • IPC: H01L23/00
Bonding apparatus and bonding method
Abstract:
A bonding apparatus includes a stage on which a substrate is seated, a gantry installed above the stage, a bonding unit configured to bond a chip to the substrate while moving along the gantry, and a control part moving the bonding unit to align the bonding unit with a bonding position on the substrate, controlling the bonding unit to allow the bonding unit to bond the chip at the bonding position, determining a movement distance of the bonding unit based on a weighted sum of a number of continuous operations and an idle time of the bonding unit.
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