Invention Grant
- Patent Title: Bonding apparatus and bonding method
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Application No.: US17397854Application Date: 2021-08-09
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Publication No.: US11705426B2Publication Date: 2023-07-18
- Inventor: Gil Yong Moon
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR 20200099712 2020.08.10
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A bonding apparatus includes a stage on which a substrate is seated, a gantry installed above the stage, a bonding unit configured to bond a chip to the substrate while moving along the gantry, and a control part moving the bonding unit to align the bonding unit with a bonding position on the substrate, controlling the bonding unit to allow the bonding unit to bond the chip at the bonding position, determining a movement distance of the bonding unit based on a weighted sum of a number of continuous operations and an idle time of the bonding unit.
Information query
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