Invention Grant
- Patent Title: High voltage extended drain MOSFET (EDMOS) devices in a high-k metal gate (HKMG)
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Application No.: US16930547Application Date: 2020-07-16
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Publication No.: US11705455B2Publication Date: 2023-07-18
- Inventor: Thorsten E. Kammler , Peter Baars
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US NY Malta
- Agency: Calderon Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238 ; H01L29/161 ; H01L29/423 ; H01L29/49 ; H01L29/66 ; H01L29/78

Abstract:
The present disclosure relates to semiconductor devices, and more particularly, to high voltage extended drain MOSFET (EDMOS) devices in a high-k metal gate (HKMG) and methods of manufacture. A structure of the present disclosure includes a plurality of extended drain MOSFET (EDMOS) devices on a high voltage well with a split-gate dielectric material including a first gate dielectric material and a second gate dielectric material, the second gate dielectric material including a thinner thickness than the first gate dielectric material, and a high-k dielectric material on the split-gate dielectric material.
Public/Granted literature
- US20220020746A1 HIGH VOLTAGE EXTENDED DRAIN MOSFET (EDMOS) DEVICES IN A HIGH-K METAL GATE (HKMG) Public/Granted day:2022-01-20
Information query
IPC分类: