Invention Grant
- Patent Title: Photodetectors integrated with an inverse taper including a curved tip
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Application No.: US17551544Application Date: 2021-12-15
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Publication No.: US11705529B2Publication Date: 2023-07-18
- Inventor: Yusheng Bian , Asif Chowdhury
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L31/18 ; H01L31/0203 ; H01L31/101

Abstract:
Structures for a photodetector and methods of fabricating a structure for a photodetector. The structure includes a first waveguide core having a first taper, a semiconductor layer having a sidewall adjacent to the first taper, and a second waveguide core having a second taper that is positioned to overlap with the first taper and a curved section. The second taper is longitudinally positioned between the sidewall of the semiconductor layer and the curved section. The curved section terminates the second waveguide core.
Public/Granted literature
- US20230187566A1 PHOTODETECTORS INTEGRATED WITH AN INVERSE TAPER INCLUDING A CURVED TIP Public/Granted day:2023-06-15
Information query
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