Invention Grant
- Patent Title: Superconductor-semiconductor fabrication
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Application No.: US16627703Application Date: 2017-11-30
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Publication No.: US11711986B2Publication Date: 2023-07-25
- Inventor: Peter Krogstrup Jeppesen
- Applicant: Microsoft Technology Licensing, LLC
- Applicant Address: US WA Redmond
- Assignee: Microsoft Technology Licensing LLC
- Current Assignee: Microsoft Technology Licensing LLC
- Current Assignee Address: US WA Redmond
- Agency: Klarquist Sparkman LLP
- Priority: GB 18897 2017.11.15
- International Application: PCT/EP2017/081038 2017.11.30
- International Announcement: WO2019/001753A 2019.01.03
- Date entered country: 2019-12-30
- Main IPC: H01L27/18
- IPC: H01L27/18 ; C23C14/28 ; C30B11/12 ; H01L29/06 ; H01L39/22 ; H01L39/24 ; H01L39/06 ; C30B23/06 ; G06N10/00 ; B82Y10/00

Abstract:
A mixed semiconductor-superconductor platform is fabricated in phases. In a masking phase, a dielectric mask is formed on a substrate, such that the dielectric mask leaves one or more regions of the substrate exposed. In a selective area growth phase, a semiconductor material is selectively grown on the substrate in the one or more exposed regions. In a superconductor growth phase, a layer of superconducting material is formed, at least part of which is in direct contact with the selectively grown semiconductor material. The mixed semiconductor-superconductor platform comprises the selectively grown semiconductor material and the superconducting material in direct contact with the selectively grown semiconductor material.
Public/Granted literature
- US20200176663A1 SUPERCONDUCTOR-SEMICONDUCTOR FABRICATION Public/Granted day:2020-06-04
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