Invention Grant
- Patent Title: Avalanche photodetectors with a multiple-thickness charge sheet
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Application No.: US17528385Application Date: 2021-11-17
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Publication No.: US11721780B2Publication Date: 2023-08-08
- Inventor: Asif Chowdhury , Yusheng Bian
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L31/18 ; H01L31/0352 ; H01L31/028

Abstract:
Structures for an avalanche photodetector and methods of forming a structure for an avalanche photodetector. The structure includes a first semiconductor layer having a first portion and a second portion, and a second semiconductor layer stacked in a vertical direction with the first semiconductor layer. The first portion of the first semiconductor layer defines a multiplication region of the avalanche photodetector, and the second semiconductor layer defines an absorption region of the avalanche photodetector. The structure further includes a charge sheet in the second portion of the first semiconductor layer. The charge sheet has a thickness that varies with position in a horizontal plane, and the charge sheet is positioned in the vertical direction between the second semiconductor layer and the first portion of the first semiconductor layer.
Public/Granted literature
- US20230155050A1 AVALANCHE PHOTODETECTORS WITH A MULTIPLE-THICKNESS CHARGE SHEET Public/Granted day:2023-05-18
Information query
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