- 专利标题: RRAM cell structure with laterally offset BEVA/TEVA
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申请号: US16910609申请日: 2020-06-24
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公开(公告)号: US11723292B2公开(公告)日: 2023-08-08
- 发明人: Chih-Yang Chang , Wen-Ting Chu , Kuo-Chi Tu , Yu-Wen Liao , Hsia-Wei Chen , Chin-Chieh Yang , Sheng-Hung Shih , Wen-Chun You
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Eschweiler & Potashnik, LLC
- 分案原申请号: US14041514 2013.09.30
- 主分类号: H10N70/00
- IPC分类号: H10N70/00 ; H10B63/00 ; H10N70/20
摘要:
The present disclosure, in some embodiments, relates to a memory device. The memory device includes a dielectric protection layer having sidewalls defining an opening over a conductive interconnect within an inter-level dielectric (ILD) layer. A bottom electrode structure extends from within the opening to directly over the dielectric protection layer. A variable resistance layer is over the bottom electrode structure and a top electrode is over the variable resistance layer. A top electrode via is disposed on the top electrode and directly over the dielectric protection layer.
公开/授权文献
- US20200335694A1 RRAM CELL STRUCTURE WITH LATERALLY OFFSET BEVA/TEVA 公开/授权日:2020-10-22
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