- 专利标题: 3D DRAM structure with high mobility channel
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申请号: US17551538申请日: 2021-12-15
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公开(公告)号: US11749315B2公开(公告)日: 2023-09-05
- 发明人: Chang Seok Kang , Tomohiko Kitajima , Gill Yong Lee , Sanjay Natarajan , Sung-Kwan Kang , Lequn Liu
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Servilla Whitney LLC
- 分案原申请号: US16779830 2020.02.03
- 主分类号: G11C5/06
- IPC分类号: G11C5/06 ; H10B12/00
摘要:
Memory devices are described. The memory devices include a plurality of bit lines extending through a stack of alternating memory layers and dielectric layers. Each of the memory layers comprises a single crystalline-like silicon layer and includes a first word line, a second word line, a first capacitor, and a second capacitor. Methods of forming stacked memory devices are also described.
公开/授权文献
- US20220108728A1 3D DRAM STRUCTURE WITH HIGH MOBILITY CHANNEL 公开/授权日:2022-04-07
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