Invention Grant
- Patent Title: Composite IC chips including a chiplet embedded within metallization layers of a host IC chip
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Application No.: US17399185Application Date: 2021-08-11
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Publication No.: US11749649B2Publication Date: 2023-09-05
- Inventor: Adel Elsherbini , Johanna Swan , Shawna Liff , Patrick Morrow , Gerald Pasdast , Van Le
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/538 ; H01L23/522 ; H01L23/00 ; H01L25/00

Abstract:
Composite IC chip including a chiplet embedded within metallization levels of a host IC chip. The chiplet may include a device layer and one or more metallization layers interconnecting passive and/or active devices into chiplet circuitry. The host IC may include a device layer and one or more metallization layers interconnecting passive and/or active devices into host chip circuitry. Features of one of the chiplet metallization layers may be directly bonded to features of one of the host IC metallization layers, interconnecting the two circuitries into a composite circuitry. A dielectric material may be applied over the chiplet. The dielectric and chiplet may be thinned with a planarization process, and additional metallization layers fabricated over the chiplet and host chip, for example to form first level interconnect interfaces. The composite IC chip structure may be assembled into a package substantially as a monolithic IC chip.
Public/Granted literature
- US20210375830A1 COMPOSITE IC CHIPS INCLUDING A CHIPLET EMBEDDED WITHIN METALLIZATION LAYERS OF A HOST IC CHIP Public/Granted day:2021-12-02
Information query
IPC分类: