发明授权
- 专利标题: Semiconductor device having contact plug connected to gate structure on PMOS region
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申请号: US17493852申请日: 2021-10-05
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公开(公告)号: US11756888B2公开(公告)日: 2023-09-12
- 发明人: Shih-Cheng Chen , Li-Hsuan Ho , Tsuo-Wen Lu , Shih-Hao Liang , Tsung-Hsun Wu , Po-Jen Chuang , Chi-Mao Hsu
- 申请人: UNITED MICROELECTRONICS CORP.
- 申请人地址: TW Hsin-Chu
- 专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人地址: TW Hsin-Chu
- 代理商 Winston Hsu
- 优先权: CN 1911033932.5 2019.10.28
- 主分类号: H01L23/535
- IPC分类号: H01L23/535 ; H01L21/28 ; H01L21/8238 ; H01L23/528 ; H01L27/092 ; H01L29/49 ; H01L29/66 ; H01L27/02
摘要:
A semiconductor device including a substrate having a NMOS region and a PMOS region; a metal gate extending continuously along a first direction from the NMOS region to the PMOS region on the substrate; a first source/drain region extending along a second direction adjacent to two sides of the metal gate on the NMOS region; a second source/drain region extending along the second direction adjacent to two sides of the metal gate on the PMOS region; a first contact plug landing on the second source/drain region adjacent to one side of the metal gate; a second contact plug landing on the second source/drain region adjacent to another side of the metal gate; and a third contact plug landing directly on a portion of the metal gate on the PMOS region and between the first contact plug and the second contact plug.
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