Invention Grant
- Patent Title: Semiconductor device having contact plug connected to gate structure on PMOS region
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Application No.: US17493852Application Date: 2021-10-05
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Publication No.: US11756888B2Publication Date: 2023-09-12
- Inventor: Shih-Cheng Chen , Li-Hsuan Ho , Tsuo-Wen Lu , Shih-Hao Liang , Tsung-Hsun Wu , Po-Jen Chuang , Chi-Mao Hsu
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN 1911033932.5 2019.10.28
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L21/28 ; H01L21/8238 ; H01L23/528 ; H01L27/092 ; H01L29/49 ; H01L29/66 ; H01L27/02

Abstract:
A semiconductor device including a substrate having a NMOS region and a PMOS region; a metal gate extending continuously along a first direction from the NMOS region to the PMOS region on the substrate; a first source/drain region extending along a second direction adjacent to two sides of the metal gate on the NMOS region; a second source/drain region extending along the second direction adjacent to two sides of the metal gate on the PMOS region; a first contact plug landing on the second source/drain region adjacent to one side of the metal gate; a second contact plug landing on the second source/drain region adjacent to another side of the metal gate; and a third contact plug landing directly on a portion of the metal gate on the PMOS region and between the first contact plug and the second contact plug.
Public/Granted literature
- US20220028787A1 SEMICONDUCTOR DEVICE HAVING CONTACT PLUG CONNECTED TO GATE STRUCTURE ON PMOS REGION Public/Granted day:2022-01-27
Information query
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