Invention Grant
- Patent Title: Photoacoustic transducer
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Application No.: US17310242Application Date: 2020-01-27
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Publication No.: US11761884B2Publication Date: 2023-09-19
- Inventor: Bart Kuyken , Mathias Vanwolleghem , Mattias Verstuyft , Benjamin Walter , Jean-Francois Lampin
- Applicant: UNIVERSITEIT GENT , IMEC VZW , VMICRO SAS , CNRS , ISEN YNCRÉA HAUTS-DE-FRANCE , UNIVERSITÉ DE LILLE , ECOLE CENTRALE DE LILLE , UNIVERSITÉ POLYTECHNIQUE HAUTS-DE-FRANCE
- Applicant Address: BE Ghent
- Assignee: VMICRO SAS,UNIVERSITEIT GENT,CNRS
- Current Assignee: VMICRO SAS,UNIVERSITEIT GENT,CNRS
- Current Assignee Address: FR Villeneuve d'Ascq; BE Ghent; FR Paris
- Agency: WORKMAN NYDEGGER
- Priority: EP 154066 2019.01.28
- International Application: PCT/EP2020/051960 2020.01.27
- International Announcement: WO2020/157022A 2020.08.06
- Date entered country: 2021-07-27
- Main IPC: G01N21/17
- IPC: G01N21/17

Abstract:
An integrated photoacoustic transducer, sensing system and method for assisting in sensing a concentration of a species in a fluid such that the integrated photoacoustic transducer includes a waveguide structure. The waveguide structure has an optical resonance spectrally overlapping a spectral absorption line or band of the species. The photoacoustic transducer includes at least one acoustic cavity formed in a portion of the waveguide structure and configured for receiving the fluid for sensing comprising the species. The at least one acoustic cavity has an acoustic resonance spectrally overlapping with a harmonic of a modulation frequency. At least one acoustic transducer comprising a deformable mechanical portion is included in the photoacoustic transducer. The deformable mechanical portion is in direct acoustic communication with the at least one acoustic cavity and has an adjustable mechanical resonance, which can be brought into spectral overlap with an acoustic resonance of the least one acoustic cavity.
Public/Granted literature
- US20220276149A1 PHOTOACOUSTIC TRANSDUCER Public/Granted day:2022-09-01
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