公开(公告)号：US20220276149A1

公开(公告)日：2022-09-01

申请号：US17310242

申请日：2020-01-27

Applicant: UNIVERSITEIT GENT ,  IMEC VZW ,  VMICRO SAS ,  CNRS ,  ISEN YNCRÉA HAUTS-DE-FRANCE ,  UNIVERSITÉ DE LILLE ,  ECOLE CENTRALE DE LILLE ,  UNIVERSITÉ POLYTECHNIQUE HAUTS-DE-FRANCE

Inventor： Bart KUYKEN ,  Mathias VANWOLLEGHEM ,  Mattias VERSTUYFT ,  Benjamin WALTER ,  Jean-Francois LAMPIN

IPC: G01N21/17

Abstract: An integrated photoacoustic transducer, sensing system and method for assisting in sensing a concentration of a species in a fluid such that the integrated photoacoustic transducer includes a waveguide structure. The waveguide structure has an optical resonance spectrally overlapping a spectral absorption line or band of the species. The photoacoustic transducer includes at least one acoustic cavity formed in a portion of the waveguide structure and configured for receiving the fluid for sensing comprising the species. The at least one acoustic cavity has an acoustic resonance spectrally overlapping with a harmonic of a modulation frequency. At least one acoustic transducer comprising a deformable mechanical portion is included in the photoacoustic transducer. The deformable mechanical portion is in direct acoustic communication with the at least one acoustic cavity and has an adjustable mechanical resonance, which can be brought into spectral overlap with an acoustic resonance of the least one acoustic cavity.

公开(公告)号：US11761884B2

公开(公告)日：2023-09-19

申请号：US17310242

申请日：2020-01-27

Applicant: UNIVERSITEIT GENT ,  IMEC VZW ,  VMICRO SAS ,  CNRS ,  ISEN YNCRÉA HAUTS-DE-FRANCE ,  UNIVERSITÉ DE LILLE ,  ECOLE CENTRALE DE LILLE ,  UNIVERSITÉ POLYTECHNIQUE HAUTS-DE-FRANCE

Inventor： Bart Kuyken ,  Mathias Vanwolleghem ,  Mattias Verstuyft ,  Benjamin Walter ,  Jean-Francois Lampin

IPC: G01N21/17

CPC classification number: G01N21/1702 ,  G01N2021/1704 ,  G01N2201/06113

Abstract: An integrated photoacoustic transducer, sensing system and method for assisting in sensing a concentration of a species in a fluid such that the integrated photoacoustic transducer includes a waveguide structure. The waveguide structure has an optical resonance spectrally overlapping a spectral absorption line or band of the species. The photoacoustic transducer includes at least one acoustic cavity formed in a portion of the waveguide structure and configured for receiving the fluid for sensing comprising the species. The at least one acoustic cavity has an acoustic resonance spectrally overlapping with a harmonic of a modulation frequency. At least one acoustic transducer comprising a deformable mechanical portion is included in the photoacoustic transducer. The deformable mechanical portion is in direct acoustic communication with the at least one acoustic cavity and has an adjustable mechanical resonance, which can be brought into spectral overlap with an acoustic resonance of the least one acoustic cavity.