Invention Grant
- Patent Title: Structure of memory device having floating gate with protruding structure
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Application No.: US17331319Application Date: 2021-05-26
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Publication No.: US11765893B2Publication Date: 2023-09-19
- Inventor: Liang Yi , Zhiguo Li , Chi Ren , Qiuji Zhao , Boon Keat Toh
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Hsinchu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. PATENTS
- Priority: CN 1910510488.5 2019.06.13
- Main IPC: H10B41/30
- IPC: H10B41/30 ; H01L29/788 ; H01L29/51 ; H01L29/423

Abstract:
A structure of memory device includes trench isolation lines in a substrate, extending along a first direction. An active region in the substrate is between adjacent two of the trench isolation lines. A dielectric layer is disposed on the active region of the substrate. A floating gate corresponding to a memory cell is disposed on the dielectric layer between adjacent two of the trench isolation lines. The floating gate has a first protruding structure at a sidewall extending along the first direction. A first insulating layer crosses over the floating gate and the trench isolation lines. A control gate line is disposed on the first insulating layer over the floating gate, extending along a second direction intersecting with the first direction. The control gate line has a second protruding structure correspondingly stacked over the first protruding structure of the floating gate, and crosses over the trench isolation lines.
Public/Granted literature
- US20210280590A1 STRUCTURE OF MEMORY DEVICE HAVING FLOATING GATE WITH PROTRUDING STRUCTURE Public/Granted day:2021-09-09
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