Invention Grant
- Patent Title: 3-axis gyroscope with rotational vibration rejection
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Application No.: US17515271Application Date: 2021-10-29
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Publication No.: US11774244B2Publication Date: 2023-10-03
- Inventor: Jeffrey A. Gregory , Charles Blackmer , Tyler Adam Dunn , Eugene Oh Hwang , Jinbo Kuang , Kemiao Jia , Laura Cornelia Popa , Igor P. Prikhodko , Erdinc Tatar
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Wilmington
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G01C19/5747
- IPC: G01C19/5747 ; G01C19/5712 ; G01C19/5719 ; G01C19/574

Abstract:
Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.
Public/Granted literature
- US20220057210A1 3-AXIS GYROSCOPE WITH ROTATIONAL VIBRATION REJECTION Public/Granted day:2022-02-24
Information query
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