公开(公告)号：US08549918B2

公开(公告)日：2013-10-08

申请号：US13775856

申请日：2013-02-25

Applicant: Analog Devices, Inc.

Inventor： Jinbo Kuang ,  William A. Clark ,  John A. Geen

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5677 ,  G01P15/09 ,  Y10T29/42

Abstract: An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.

Abstract translation: 惯性传感器包括驱动压电换能器，用于实现谐振器的振荡，感测压电换能器，以便能够检测惯性传感器的运动，以及压电补偿元件在驱动和感测压电换能器之间基本上等距离，其中补偿元件和 谐振器形成具有电容间隙的相应的电容器，并且其中，在谐振器的振荡期间，用补偿元件测量存储在电容器中的静电电荷的变化，并且被修改以便改变谐振器的振荡。

公开(公告)号：US11774244B2

公开(公告)日：2023-10-03

申请号：US17515271

申请日：2021-10-29

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5712 ,  G01C19/5719

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US20210381834A1

公开(公告)日：2021-12-09

申请号：US16894717

申请日：2020-06-05

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US20220057210A1

公开(公告)日：2022-02-24

申请号：US17515271

申请日：2021-10-29

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US11193771B1

公开(公告)日：2021-12-07

申请号：US16894717

申请日：2020-06-05

Applicant: Analog Devices, Inc.

Inventor： Jeffrey A. Gregory ,  Charles Blackmer ,  Tyler Adam Dunn ,  Eugene Oh Hwang ,  Jinbo Kuang ,  Kemiao Jia ,  Laura Cornelia Popa ,  Igor P. Prikhodko ,  Erdinc Tatar

IPC: G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

公开(公告)号：US10514259B2

公开(公告)日：2019-12-24

申请号：US15253792

申请日：2016-08-31

Applicant: Analog Devices, Inc.

Inventor： Kemiao Jia ,  Xin Zhang ,  Jianglong Zhang ,  Jinbo Kuang

IPC: G01C19/5705 ,  G01C19/5712

Abstract: A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.

公开(公告)号：US20190152766A1

公开(公告)日：2019-05-23

申请号：US16254065

申请日：2019-01-22

Applicant: Analog Devices, Inc.

Inventor： Jinbo Kuang ,  Gaurav Vohra

IPC: B81B3/00 ,  B81C1/00

Abstract: Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.

公开(公告)号：US10239746B2

公开(公告)日：2019-03-26

申请号：US15650822

申请日：2017-07-14

Applicant: Analog Devices, Inc.

Inventor： Jinbo Kuang ,  Gaurav Vohra

IPC: B81B3/00 ,  B81C1/00

Abstract: Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.

公开(公告)号：US08555718B2

公开(公告)日：2013-10-15

申请号：US13775849

申请日：2013-02-25

Applicant: Analog Devices, Inc.

Inventor： Jinbo Kuang ,  William A. Clark ,  John A. Geen

IPC: G01C19/56 ,  H02N2/04

CPC classification number: G01C19/56 ,  G01C19/5677 ,  G01P15/09 ,  Y10T29/42

Abstract: An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.

Abstract translation: 惯性传感器包括驱动压电换能器，用于实现谐振器的振荡，感测压电换能器，以便能够检测惯性传感器的运动，以及压电补偿元件在驱动和感测压电换能器之间基本上等距离，其中补偿元件和 谐振器形成具有电容间隙的相应的电容器，并且其中，在谐振器的振荡期间，用补偿元件测量存储在电容器中的静电电荷的变化，并且被修改以便改变谐振器的振荡。

公开(公告)号：US10882735B2

公开(公告)日：2021-01-05

申请号：US16254065

申请日：2019-01-22

Applicant: Analog Devices, Inc.

Inventor： Jinbo Kuang ,  Gaurav Vohra

IPC: B81B3/00 ,  B81C1/00

Abstract: Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.