Invention Grant
- Patent Title: Three-dimensional memory device and method for manufacturing the same
-
Application No.: US17125407Application Date: 2020-12-17
-
Publication No.: US11778823B2Publication Date: 2023-10-03
- Inventor: Teng-Hao Yeh , Hang-Ting Lue , Guan-Ru Lee
- Applicant: MACRONIX International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. PATENTS
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B41/27 ; H10B41/41 ; H10B43/40

Abstract:
The present disclosure provides a three-dimensional memory device and a method for manufacturing the same. The three-dimensional memory device includes a plurality of tiles, and each tiles includes a plurality of blocks, and each blocks includes a gate stacked structure, a conductive layer, first ring-shaped channel pillars, source/drain pillars, and charge storage structures. The gate stacked structure is disposed on the substrate and includes gate layers electrically insulated from each other. The conductive layer is disposed between the substrate and the gate stacked structure. The first ring-shaped channel pillars are disposed on the substrate and located in the gate stacked structure. The source/drain pillars are disposed on the substrate, and each of the first ring-shaped channel pillars are configured with two source/drain pillars disposed therein. Each of the charge storage structures is disposed between the corresponding gate layer and the corresponding first ring-shaped channel pillar. The conductive layer in one of the tiles is isolated from the conductive layers in the other tiles.
Public/Granted literature
- US20220199639A1 THREE-DIMENSIONAL MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2022-06-23
Information query