Invention Grant
- Patent Title: Three-dimensional semiconductor memory device
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Application No.: US17848789Application Date: 2022-06-24
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Publication No.: US11778828B2Publication Date: 2023-10-03
- Inventor: Shinya Arai
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L29/792 ; H10B43/10 ; H10B43/20 ; H01L23/528 ; H01L23/532 ; H01L29/06 ; H01L29/08 ; H01L29/45

Abstract:
According to one embodiment, a semiconductor memory device includes a substrate; an insulating layer provided on the substrate; a conductive layer provided on the insulating layer; a stacked body provided on the conductive layer and including a plurality of electrode layers and a plurality of insulating layers respectively provided among the plurality of electrode layers; a columnar section piercing through the stacked body to reach the conductive layer and extending in a first direction in which the stacked body is stacked; and a source layer. The columnar section includes a channel body and a charge storage film provided between the channel body and the respective electrode layers. The conductive layer includes a first film having electric conductivity and in contact with the lower end portion of the channel body; and an air gap provided to be covered by the first film.
Public/Granted literature
- US20220320139A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-10-06
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