- 专利标题: Thin die release for semiconductor device assembly
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申请号: US16713309申请日: 2019-12-13
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公开(公告)号: US11791212B2公开(公告)日: 2023-10-17
- 发明人: Andrew M. Bayless , Brandon P. Wirz
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Perkins Coie LLP
- 主分类号: H01L21/78
- IPC分类号: H01L21/78 ; H01L21/50 ; H01L21/683 ; H01L21/67
摘要:
Methods for releasing thinned semiconductor dies from a mount tape and associated apparatuses are disclosed. In one embodiment, a sacrificial layer may be disposed at a back side of thinned substrate including semiconductor dies. The sacrificial layer includes materials soluble in contact with a fluid (and/or vapor). A sheet of perforated mount tape may be attached to the sacrificial layer and an ejection component may be provided under a target semiconductor die to be released. The ejection component is configured to create a locally confined puddle of the fluid under the target semiconductor die such that the sacrificial layer is removed to release the target semiconductor die from the mount tape. Further, a support component may be provided to pick up the target semiconductor die after the target semiconductor die is released from the mount tape.
公开/授权文献
- US20210183702A1 THIN DIE RELEASE FOR SEMICONDUCTOR DEVICE ASSEMBLY 公开/授权日:2021-06-17
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