Invention Grant
- Patent Title: Three-dimensional semiconductor memory device and method of fabricating the same
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Application No.: US17026377Application Date: 2020-09-21
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Publication No.: US11792982B2Publication Date: 2023-10-17
- Inventor: Woosung Yang , Hojun Seong , Joonhee Lee , Joon-Sung Lim , Euntaek Jung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR 20200008895 2020.01.22
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H10B43/27 ; H01L23/522 ; H10B41/10 ; H10B41/27 ; H10B41/46 ; H10B43/10 ; H10B43/40

Abstract:
Disclosed is a semiconductor memory device comprising a second substrate on a first substrate and including a lower semiconductor layer and an upper semiconductor layer on the lower semiconductor layer, an electrode structure on the upper semiconductor layer and including a plurality of stacked electrodes, a vertical channel structure that penetrates the electrode structure and is connected to the second substrate, an interlayer dielectric layer that covers the electrode structure, and a cutting structure that penetrates the interlayer dielectric layer and the upper semiconductor layer. The upper semiconductor layer has a first sidewall defined by the cutting structure. The lower semiconductor layer has a second sidewall adjacent to the first sidewall. The first sidewall and the second sidewall are horizontally offset from each other.
Public/Granted literature
- US20210225870A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2021-07-22
Information query
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