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公开(公告)号:US11895840B2
公开(公告)日:2024-02-06
申请号:US17895182
申请日:2022-08-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Woosung Yang , Byungjin Lee , Bumkyu Kang , Joonsung Lim
IPC: H10B43/27 , H01L23/00 , G11C7/18 , H01L23/522 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/40 , H10B43/10 , H10B43/35 , H10B43/40
CPC classification number: H10B43/27 , G11C7/18 , H01L23/5226 , H01L24/09 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/40 , H10B43/10 , H10B43/35 , H10B43/40
Abstract: A memory device includes a lower structure and a plurality of upper structures stacked on the lower structure. The lower structure includes a peripheral circuit, and an upper bonding pad disposed on a top surface of the lower structure. Each of the plurality of upper structures includes a bit line, a through via, and a lower bonding pad disposed on a bottom surface of the upper structures and connected to the through via. Each of upper structures, other than an uppermost upper structure, further includes an upper bonding pad disposed on a top surface thereof and connected to the through via. The bit line includes a gap separating a first portion of the bit line from a second portion thereof in the horizontal direction, and the through via overlaps the gap of the bit line in a plan view.
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公开(公告)号:US11495542B2
公开(公告)日:2022-11-08
申请号:US16875174
申请日:2020-05-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jiyoung Kim , Woosung Yang , Jungsok Lee , Byungjin Lee
IPC: H01L27/11582 , H01L23/535 , H01L27/11524 , H01L27/11556 , H01L27/11529 , H01L27/11519 , H01L21/768 , H01L27/11573 , H01L27/11565 , H01L27/1157
Abstract: A semiconductor memory includes electrode structures that each includes horizontal electrodes stacked on each other a substrate, vertical electrodes between the electrode structures and extending along the horizontal electrodes, first contacts connected to the horizontal electrodes at end portions of the electrode structures, second contacts connected to upper portions of the vertical electrodes, and a first interconnection structure connected to top surfaces of the second contacts. The first interconnection structure includes first and second sub-interconnection lines. The sub-interconnection lines extend in a first direction and contact the top surfaces of the second contacts. The second sub-interconnection lines extended in a second direction crossing the first direction and contact the first sub-interconnection lines.
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公开(公告)号:US11296102B2
公开(公告)日:2022-04-05
申请号:US16858983
申请日:2020-04-27
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sung-Min Hwang , Woosung Yang , Joon-Sung Lim , Jiyoung Kim , Jiwon Kim
IPC: H01L27/11556 , H01L27/11582 , H01L23/528 , G11C5/06 , G11C5/02
Abstract: Disclosed is a three-dimensional semiconductor memory device including a substrate including a cell array region and a connection region, a stack including first and second stacks sequentially stacked on the substrate, the stack having a staircase structure on the connection region, each of the first and second stacks including conductive patterns vertically stacked on the substrate, and contact plugs disposed on the connection region and respectively coupled to the conductive patterns. A bottom surface of each contact plug is located between top and bottom surfaces of a corresponding conductive pattern. In each stack, a recess depth of each contact plug varies monotonically in a stacking direction of the conductive patterns, when measured from a top surface of a corresponding conductive pattern. The contact plugs coupled to an uppermost conductive pattern of the first stack and a lowermost conductive pattern of the second stack have discrete recess depths.
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公开(公告)号:US11289504B2
公开(公告)日:2022-03-29
申请号:US16777776
申请日:2020-01-30
Applicant: Samsung Electronics Co., Ltd.
Inventor: Woosung Yang , Dong-Sik Lee , Sung-Min Hwang , Joon-Sung Lim
IPC: H01L27/11582 , H01L27/11526 , H01L27/11556 , H01L23/528 , H01L27/11519 , H01L27/11565 , H01L27/11573 , H01L23/522 , H01L21/28 , H01L29/66
Abstract: A three-dimensional semiconductor memory device may include horizontal patterns disposed on a peripheral circuit structure and spaced apart from each other, memory structures provided on the horizontal patterns, respectively, each of the memory structures including a three-dimensional arrangement of memory cells. Penetrating insulating patterns and separation structures may isolate the horizontal patterns from one another. Through vias may extend through the penetrating insulating patterns to connect logic circuits of the peripheral circuit structure to the memory structure.
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公开(公告)号:US12069858B2
公开(公告)日:2024-08-20
申请号:US18194258
申请日:2023-03-31
Applicant: Samsung Electronics Co., Ltd.
Inventor: Woosung Yang , Byungjin Lee , Bumkyu Kang , Dong-Sik Lee
IPC: H10B41/20 , G11C7/18 , G11C16/08 , H01L23/522 , H01L23/528 , H10B41/10 , H10B41/46 , H10B41/48 , H10B43/10 , H10B43/20 , H10B43/27 , H10B43/40
CPC classification number: H10B41/46 , G11C7/18 , G11C16/08 , H01L23/5226 , H01L23/5283 , H10B41/10 , H10B41/20 , H10B41/48 , H10B43/10 , H10B43/20 , H10B43/40
Abstract: A three-dimensional semiconductor memory device including a first peripheral circuit including different decoder circuits, a first memory on the first peripheral circuit, the first memory including a first stack structure having first electrode layers stacked on one another and first inter-electrode dielectric layers therebetween, a first planarized dielectric layer covering an end of the first stack structure, and a through via that penetrates the end of the first stack structure, the through via electrically connected to one of the decoder circuits, and a second memory on the first memory and including a second stack structure having second electrode layers stacked on one another and second inter-electrode dielectric layers therebetween, a second planarized dielectric layer covering an end of the second stack structure, and a cell contact plug electrically connecting one of the second electrode layers to the through via.
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公开(公告)号:US20240164101A1
公开(公告)日:2024-05-16
申请号:US18355450
申请日:2023-07-20
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jiwon Kim , Jiyoung Kim , Woosung Yang , Dohyung Kim , Sukkang Sung
IPC: H10B43/27 , H01L23/522 , H01L23/528 , H01L25/065 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/41 , H10B43/10 , H10B43/35 , H10B43/40 , H10B80/00
CPC classification number: H10B43/27 , H01L23/5226 , H01L23/5283 , H01L25/0652 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/41 , H10B43/10 , H10B43/35 , H10B43/40 , H10B80/00 , H01L2225/06541
Abstract: Disclosed are 3D semiconductor memory devices and electronic systems including the same. The 3D semiconductor memory device comprises a first substrate, a peripheral circuit structure on the first substrate, and a cell array structure on the peripheral circuit structure. The cell array structure includes a second substrate, a stack structure between the second substrate and the peripheral circuit structure and including interlayer dielectric layers and conductive patterns that are stacked alternately with the interlayer dielectric layers, vertical channel structures that include respective portions the stack structure and include vertical semiconductor patterns, respectively, and connection vias that include respective portions the second substrate and are connected to respective top surfaces of the vertical semiconductor patterns.
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公开(公告)号:US20230170302A1
公开(公告)日:2023-06-01
申请号:US17934743
申请日:2022-09-23
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jimo Gu , Jiyoung Kim , Woosung Yang , Sukkang Sung , Chang-Sup Lee
IPC: H01L23/535 , H01L27/11556 , H01L27/11529 , H01L27/11582 , H01L27/11573
CPC classification number: H01L23/535 , H01L27/11556 , H01L27/11529 , H01L27/11582 , H01L27/11573
Abstract: Disclosed are semiconductor devices and electronic systems including the same. A semiconductor device includes a substrate including a cell array region and a connection region, an electrode structure including electrodes and dielectric layers that are stacked in alternating fashion, each of the plurality of electrodes including an electrode part on the cell array region and a pad part on the connection region, dummy vertical structures on the connection region and penetrating the pad parts of each of the electrodes, and a cell contact plug on the connection region and coupled to the pad part of each of the electrodes. A thickness of the pad part is greater than that of the electrode part. The pad part has a lower portion connected to the electrode part and an upper portion on the lower portion. Between adjacent ones of the dummy vertical structures, a width of the upper portion is not less than that of the lower portion.
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公开(公告)号:US11641738B2
公开(公告)日:2023-05-02
申请号:US17021416
申请日:2020-09-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Woosung Yang , Byungjin Lee , Bumkyu Kang , Dong-Sik Lee
IPC: H01L27/11539 , H01L23/522 , H01L27/11519 , H01L27/11551 , H01L27/11565 , H01L27/11573 , H01L23/528 , H01L27/11543 , G11C16/08 , G11C7/18 , H01L27/11578
Abstract: A three-dimensional semiconductor memory device including a first peripheral circuit including different decoder circuits, a first memory on the first peripheral circuit, the first memory including a first stack structure having first electrode layers stacked on one another and first inter-electrode dielectric layers therebetween, a first planarized dielectric layer covering an end of the first stack structure, and a through via that penetrates the end of the first stack structure, the through via electrically connected to one of the decoder circuits, and a second memory on the first memory and including a second stack structure having second electrode layers stacked on one another and second inter-electrode dielectric layers therebetween, a second planarized dielectric layer covering an end of the second stack structure, and a cell contact plug electrically connecting one of the second electrode layers to the through via.
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公开(公告)号:US11251196B2
公开(公告)日:2022-02-15
申请号:US16749255
申请日:2020-01-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jaeho Ahn , Woosung Yang , Joonsung Lim , Sungmin Hwang
IPC: H01L27/11582 , H01L27/11556 , H01L23/528 , H01L27/11526 , H01L23/522 , H01L25/065 , H01L23/00 , H01L27/11573
Abstract: An integrated circuit device includes: a lower memory stack including a plurality of lower word lines located on a substrate, an upper memory stack located on the lower memory stack and including a plurality of upper word lines, at least one first lower interconnection layer extending in a horizontal direction at a first vertical level between the lower memory stack and the upper memory stack, and configured to be electrically connected to at least one lower word line selected from the plurality of lower word lines, a separate insulating film covering at least one first lower interconnection layer, and at least one first upper interconnection layer extending in the horizontal direction at a second vertical level higher than the upper memory stack, and configured to be electrically connected to at least one upper word line selected from the upper word lines.
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公开(公告)号:US20240371730A1
公开(公告)日:2024-11-07
申请号:US18411171
申请日:2024-01-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ahreum Lee , Woosung Yang , Jimo Gu , Sukkang Sung
IPC: H01L23/48 , H01L23/00 , H01L25/065 , H10B80/00
Abstract: Disclosed are semiconductor devices and semiconductor packages including the same. The semiconductor package includes a package substrate, and a first chip stack and a second chip stack that are stacked on the package substrate. Each of the first and second chip stacks includes a plurality of vertically stacked semiconductor chips. Each of the semiconductor chips includes a plurality of first vertical connection structures and a plurality of second vertical connection structures. The first vertical connection structures of the semiconductor chips in the second chip stack overlap and are connected with the second vertical connection structures of the semiconductor chips in the first chip stack.
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