Invention Grant
- Patent Title: Polishing liquid composition for silicon oxide film
-
Application No.: US16958640Application Date: 2018-12-21
-
Publication No.: US11795346B2Publication Date: 2023-10-24
- Inventor: Yohei Uchida
- Applicant: KAO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KAO CORPORATION
- Current Assignee: KAO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP 17253993 2017.12.28
- International Application: PCT/JP2018/047344 2018.12.21
- International Announcement: WO2019/131545A 2019.07.04
- Date entered country: 2020-06-26
- Main IPC: C09G1/02
- IPC: C09G1/02 ; B24B37/04 ; H01L21/3105

Abstract:
A polishing liquid composition for a silicon oxide film according to the present invention includes cerium oxide particles, a water-soluble macromolecular compound, and an aqueous medium, and the water-soluble macromolecular compound is a water-soluble macromolecular compound including a betaine structure, excluding carbobetaine homopolymers and sulfobetaine homopolymers. The water-soluble macromolecular compound is preferably a water-soluble macromolecular compound containing a constitutional unit A including a betaine structure, and a constitutional unit B that is a constitutional unit other than the constitutional unit A and contains at least one group of a primary amino group, a secondary amino group, a tertiary amino group, a quaternary ammonium group, and salts thereof.
Public/Granted literature
- US20200369919A1 POLISHING LIQUID COMPOSITION FOR SILICON OXIDE FILM Public/Granted day:2020-11-26
Information query