Invention Grant
- Patent Title: Production apparatus for gallium oxide crystal capable of preventing harmful substances formed in furnace from being diffused to surroundings of furnace
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Application No.: US17555680Application Date: 2021-12-20
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Publication No.: US11795568B2Publication Date: 2023-10-24
- Inventor: Keigo Hoshikawa , Toshinori Taishi , Takumi Kobayashi , Yoshio Otsuka , Etsuko Ohba
- Applicant: Fujikoshi Machinery Corp. , SHINSHU UNIVERSITY
- Applicant Address: JP Nagano
- Assignee: FUJIKOSHI MACHINERY CORP.,SHINSHU UNIVERSITY
- Current Assignee: FUJIKOSHI MACHINERY CORP.,SHINSHU UNIVERSITY
- Current Assignee Address: JP Nagano; JP Nagano
- Agency: Stites & Harbison, PLLC
- Agent Stephen J. Weyer, Esq.
- Priority: JP 21013100 2021.01.29
- Main IPC: C30B11/00
- IPC: C30B11/00 ; C30B29/16

Abstract:
A production apparatus for a metal oxide single crystal according to one aspect of the present invention includes: a furnace having an interior heated to a temperature of 1,500° C. or more in an oxidative atmosphere, a heater heating the interior of the furnace, an inlet pipe being disposed in a lower part of the furnace and connecting an interior and an exterior of the furnace, an exhaust pipe being disposed in an upper part of the furnace and connecting an interior and an exterior of the furnace, a duct being disposed above the furnace, and an exhaust fan and a harmful substance elimination device being disposed in the middle of the duct.
Public/Granted literature
- US20220243358A1 PRODUCTION APPARATUS FOR METAL OXIDE SINGLE CRYSTAL Public/Granted day:2022-08-04
Information query
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