Invention Grant
- Patent Title: Extended lifetime dual indirectly-heated cathode ion source
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Application No.: US17491084Application Date: 2021-09-30
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Publication No.: US11798775B2Publication Date: 2023-10-24
- Inventor: Wilhelm Platow , Neil Bassom , Jonathan David
- Applicant: Axcelis Technologies, Inc.
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01J27/00
- IPC: H01J27/00 ; H01J37/08 ; H01J37/075 ; H01J37/317

Abstract:
An ion source has an arc chamber with a first end and a second end. A first cathode at the first end of the arc chamber has a first cathode body and a first filament disposed within the first cathode body. A second cathode at the second end of the arc chamber has a second cathode body and a second filament disposed within the second cathode body. A filament switch selectively electrically couples a filament power supply to each of the first filament and the second filament, respectively, based on a position of the filament switch. A controller controls the position of the filament switch to alternate the electrical coupling of the filament power supply between the first filament and the second filament for a plurality of switching cycles based on predetermined criteria. The predetermined criteria can be a duration of operation of the first filament and second filament.
Public/Granted literature
- US20230100805A1 EXTENDED LIFETIME DUAL INDIRECTLY-HEATED CATHODE ION SOURCE Public/Granted day:2023-03-30
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