Invention Grant
- Patent Title: Transfer unit, and apparatus and method for treating substrate
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Application No.: US17244722Application Date: 2021-04-29
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Publication No.: US11804386B2Publication Date: 2023-10-31
- Inventor: Young Hun Lee , Jae Myoung Lee
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Priority: KR 20160065848 2016.05.27
- Main IPC: H01L21/06
- IPC: H01L21/06 ; H01L21/677 ; H01L21/687 ; H01L21/67

Abstract:
Disclosed are an apparatus and a method for liquid-treating a substrate. An apparatus for treating a substrate includes a liquid treatment chamber that supplies a liquid onto the substrate to liquid-treat the substrate, a drying chamber that removes the remained liquid on the substrate, and a transfer unit that transfers the substrate between the liquid treatment chamber and the drying chamber, wherein the transfer unit includes a hand that supports the substrate, and a weight measuring unit that measures a weight of the remained liquid on the substrate. A weight of a remained liquid on a substrate may be measured by measuring a weight of the substrate while the substrate is transferred.
Public/Granted literature
- US20210249278A1 TRANSFER UNIT, AND APPARATUS AND METHOD FOR TREATING SUBSTRATE Public/Granted day:2021-08-12
Information query
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