Invention Grant
- Patent Title: Workpiece supporting apparatus and workpiece supporting method
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Application No.: US17405351Application Date: 2021-08-18
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Publication No.: US11804398B2Publication Date: 2023-10-31
- Inventor: Makoto Kashiwagi , Mao Izawa
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: PEARNE & GORDON LLP
- Priority: JP 20144540 2020.08.28
- Main IPC: B25B11/00
- IPC: B25B11/00 ; H01L21/683 ; B24B1/00

Abstract:
A workpiece supporting apparatus capable of preventing a surface of a workpiece from drying out while maintaining a suction force when supporting the workpiece with a Bernoulli chuck is disclosed. The workpiece supporting apparatus includes a Bernoulli chuck configured to generate a suction force by emitting a gas; and a liquid ejection member surrounding the Bernoulli chuck and configured to discharge a liquid around the Bernoulli chuck.
Public/Granted literature
- US20220068695A1 WORKPIECE SUPPORTING APPARATUS AND WORKPIECE SUPPORTING METHOD Public/Granted day:2022-03-03
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