公开(公告)号：US11804398B2

公开(公告)日：2023-10-31

申请号：US17405351

申请日：2021-08-18

Applicant: EBARA CORPORATION

Inventor： Makoto Kashiwagi ,  Mao Izawa

IPC: B25B11/00 ,  H01L21/683 ,  B24B1/00

CPC classification number: H01L21/6838 ,  B24B1/00

Abstract: A workpiece supporting apparatus capable of preventing a surface of a workpiece from drying out while maintaining a suction force when supporting the workpiece with a Bernoulli chuck is disclosed. The workpiece supporting apparatus includes a Bernoulli chuck configured to generate a suction force by emitting a gas; and a liquid ejection member surrounding the Bernoulli chuck and configured to discharge a liquid around the Bernoulli chuck.