- 专利标题: Double-sided substrate with cavities for direct die-to-die interconnect
-
申请号: US16524743申请日: 2019-07-29
-
公开(公告)号: US11817423B2公开(公告)日: 2023-11-14
- 发明人: Pooya Tadayon
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt, P.C.
- 主分类号: H01L25/065
- IPC分类号: H01L25/065 ; H01L23/13 ; H01L23/538
摘要:
Embodiments include a package substrate and semiconductor packages. A package substrate includes a first cavity in a top surface, first conductive pads on a first surface of the first cavity, a second cavity in a bottom surface, second conductive pads on a second surface of the second cavity, where the first surface is above the second surface, and a third cavity in the first and second cavities, where the third cavity vertically extends from the top surface to the bottom surface. The third cavity overlaps a first portion of the first cavity and a second portion of the second cavity. The package substrate may include conductive lines coupled to the first and second conductive pads, a first die in the first cavity, a second die in the second cavity, and interconnects in the third cavity that directly couple first die to the second die.
公开/授权文献
信息查询
IPC分类: